光掩模缺陷分类和尺寸定义的准则的英文

• guidelines for photomask defect classification and size definition

• 光:    light; ray
• 掩:    cover; hide
• 模:    mould; pattern; matrix
• 缺陷:    defect; flaw
• 分类:    classify

例句与用法

1. Guidelines for photomask defect classification and size definition
   光掩模缺陷分类和尺寸定义的准则