Lithography, as used in the manufacture of ics, is the process of transferring geometic shapes on a mask to the surface of a silicon wafer . 光刻技术应用到集成电路制造中,就是将掩模版的几何图形转移到硅片表面的工艺过程。
Analysis of nanometrology and atom photolithography 纳米计量与原子光刻技术分析
The prospect for the maskless lithography technology 无掩模光刻技术的前景
Recent progress in photolithography technology 光刻技术及其新进展
The paper also emphatically studies some main applications of interferometric lithographic technology 故本文还着重研究了干涉光刻技术的一些主要应用。