Preparation of super - smooth surface on crystal or glass has become , one of the key problems in precision process with the developments in optics , microelectronics , space and laser technologies 摘要随着光学、微电子、航天和激光技术的发展,在晶体或玻璃等无机材料上制备亚纳米级的超光滑无损伤表面已成为现代精密加工技术领域的重点研究课题。
For satisfying the demand of isolating the low - frequency vibration in precision process , this thesis conducts theoretical and experimental research on an active isolation system of small vibration based on piezoceramic actuator 为了满足精密加工隔离低频振动信号的需要,本论文对采用压电陶瓷制成的低频精密主动隔振系统进行了理论、仿真和实验研究。
Micron and nanometer displacement measurement technology is widely used in the field of mems assembly , ic manufacturing and packaging , ultra precision process , etc , and its development trend is high speed and high precision 微纳米测量技术在微机电系统( mems )装配与集成、集成电路( ic )制造与封装、超精密加工等领域广泛应用,并朝着高速、高精度方向发展。
Cutting tools ( milling cutter , drilling bit and reaming cutter ) : high - rigid , ultra - precise and super wear - resistant tungsten carbide steel cutters can smoothly perform high - speed processing , precision processing and rigid material processing 切削工具(铣刀、钻头、绞刀) :高刚性、超精密及超耐用的优质碳化钨切削工具,使得高速加工、精密加工及硬材加工得心应手。